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Y.-H. Huh, D. I. Kim, S. G. Hong
OUT-OF-PLANE ESPI TECHNIQUE FOR MEASURING BULGE DEORMATION

Out-of-plane ESPI ESPI (Electronic Speckle Pattern Interferometric) technique was developed for measuring the bulge deformation of the film material obtained from the bulge test. In this study, the bulge test was carried out using the copper film 18 ìm thick and with the bulge testing system including the ESPI system. It can be verified that the 3-dimensional profiles of the deformation measured for the rectangular and square windows were simulated with the cylindrical and spherical vessel models, respectively. From the test, pressure-deformation curve were obtained by consequently acquiring the speckle patterns of the bulged membrane. Furthermore, the stress-strain curve could be determined from the pressure-deformation curve and the elastic modulus for the copper film were determined.

T.Nesterenko, M.Peresvetov, Y.Chursin
DYNAMIC BEHAVIOR OF MICROMECHANICAL ANGULAR RATE TWO-COMPONENT SENSOR

A mathematical model was designed; dynamic behavior of angular rate sensor was detected. The influence of cross rates on primary and informational sensor channels’ properties was stated.

R. Kudo, S. Takahashi, K. Takamasu
DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT

The demand which detects the defect of a detailed structure is increasing. However the resolution of the general optical inspection method is not enough. In order to raise resolution, utilizing the advantage of optical detection, we proposed the novel optical inspection method. Although the steady value was conventionally set up as an initial value of processing, a design value is set as an initial value in this research. As a result, highly precise defective detection is attained rather than the conventional technique. Moreover, the possibility of the detection using low magnifying power is confirmed.

Mustafa Erol, Metin Yurddaskal, Serdar Yýldýrým, Ömer Mermer, Gökcen Bas, Mehmet Çakmakçý, M. Numan Durakbasa, Erdal Çelik,
NANOMETRIC MEASUREMENT OF THE PRE NANO SCALE TiO2 POWDERS VIA FLAME SPRAY PYROLYSIS: SYNTHESIS, PROPERTIES AND PHOTOCATALYTICAL DECOMPOSITION OF METHYLEN BLUE

In this study, nanometric measurement of the TiO2 powders were analysed that were synthesized via flame spray pyrolysis for photocatalytic decomposition process. Continues increase of new metrological demands have enabled to fulfill the highest demand in measurement resolution. In order to obtain crystalline structure, the produced powders were post-annealed at 600oC after flame spray pyrolysis process. The phase structure was analyzed by x-ray diffractometer (XRD). Particle size of the powders was determined using particle size analyzer. The morphology and accurate size of the primary particles were further investigated by several devices in order to illuminate the particle size, phase structure, morphology and photocatalytic properties

Gapinski B., Kolodziej A., Pawlowski M., Marciniak L., Grzelka M., Lukaszyk M.
INFLUENCE OF MEASUREMENT STRATEGY ON THE VALUE OF CYLINDRICITY

Never-ending growth of market`s demands causes necessity to control not only geometric dimensions but also complex character of form deviations. Simultaneously, reduction of both costs and working time of production process is expected. What is more, shortening of inspection time need to be considered.
The aim of the paper is to present research on the influence of measurement strategy on correctness of cylindricity determination. Recommendations on proper selection of measurement strategy with taking into consideration the birth – cage method, methods of generatrix lines and roundness profiles of elements with different character of cylindricity are displayed.
Presented recommendations allow to use measurement equipment effectively by minimization of measurement time with respect to its metrological correctness.

C.-S. Kang, U. Griesmann, J. A. Soons
MEASUREMENT OF THE DIAMETER VARIATION AND REFRACTIVE INDEX INHOMOGENEITY OF A FUSED SILICA SPHERE USING FOURSURFACE PHASE-SHIFTING INTERFEROMETRY

The diameter variation and refractive index inhomogeneity of a fused silica sphere were measured with a frequency-shifting Fizeau interferometer in a four-surface configuration. The phase-shifting algorithms to analyze the interference signals for each basic cavity were designed using the characteristic polynomial theory. We describe the experimental setup and preliminary results.

A. Jakstas, S. Kausinis, A. Kasparaitis, R. Barauskas, A. Barakauskas
THERMAL ERROR ANALYSIS OF PRECISION INTERFEROMETRIC LENGTH MEASUREMENT SYSTEMS

The paper describes the practical application of thermal error analysis for precision length measurement systems operating in non-ideal environments. Finite element analysis and experimental investigations are carried out to examine the essence of thermal process and to demonstrate the existence and feasibility of the thermal modal analysis in precision line scale calibration system.

J. Sladek, A. Gaska, M. Krawczyk
ON-LINE ESTIMATION OF THE COORDINATE MEASUREMENTS ACCURACY IN LABORATORY AND INDUSTRIAL CONDITIONS

According to technological requirements, measurements are useful only when they are stated with their accuracy. Due to this fact, the importance is given to the possibility of determining the accuracy of measurement. Currently used methods for the measurements accuracy estimation are difficult to implement and time consuming, and because of it, the issue of accuracy estimation is often underestimated, especially in industrial conditions. Method presented in this paper is an on-line accuracy estimation method based on virtual CMM idea. The prevalence of this method can help to improve this situation, and thus reduce the amount of erroneous assessments of compliance of the products with their geometrical specification.

C. R. Baldo, G. D. Donatelli
EXPERIMENTAL ANALYSIS OF INDUSTRIAL COORDINATE MEASURING SYSTEMS USING A CALIBRATED PRODUCTION WORKPIECE

The measurement of a part on a coordinate measuring machine may be affected by many factors such as the machine accuracy itself, the measuring environment, the probe configuration, and the measuring strategy. In order to understand the effect of some of those factors on industrial-grade machines, a master production workpiece has been circulated in Brazilian industries for measuring particular GPS features according to a predefined master measuring protocol. Conclusions could be drawn about the behaviour of each machine under varying conditions, the measurement divergences from one similar machine to another operating under distinct conditions, the complexity of measurements with CMMs, and the need for good measurement practices in the productive sector.

C. R. Baldo, G. D. Donatelli
MEASUREMENT UNCERTAINTY COMBINED WITH THE MODEL OF PRODUCT AND MEASUREMENT REALIZATION IN 3D METROLOGY

Even though coordinate metrology has been proven to be priceless to industries and despite the existence of methods to estimate uncertainties, e.g. sensitivity analysis, computer simulation, experimental method; uncertainty has been barely assessed and stated by industrial metrologists. Part of that perception may be attributed to a restricted way of employing the measurement uncertainty concept, which is not compatible with the growing importance of metrology. The merging of the well-known product and measurement realization process with measurement uncertainty concept is outlined in this work. The main idea is to use in a rational sense different techniques of evaluating the uncertainty of a measurement result, where the estimated accuracy required to the uncertainty estimation defines the suitable technique. Within the proposed context, the drawing-up of classical uncertainty budgets for GPS characteristics are shown and discussed for different measurement scenarios.

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