Intelligent Data Analysis System (IDAS) tool for Oxidation State Analysis of Copper Leadframes using Auger Electron Microprobe |
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| Abegail Santillan, Marianne Therese Bauca, Lynne Jerisa Castro, Zamantha Nadir Martin, Araceli Monsada |
- Abstract:
- The Semiconductor and Electronics (S&E) sector is vital to the Philippine economy, with copper (Cu) extensively used in semiconductor packaging. However, Cu’s susceptibility to oxidation can impair leadframe reliability. This study establishes an Auger electron spectroscopy (AES) spectral profiling database to identify oxidation states in Cu alloy-based leadframes, using the Intelligent Data Analysis System (IDAS) developed by DOST-ITDI and ASTI. Oxidation was simulated via controlled heat treatment, with surface changes analyzed through optical microscopy, FE-SEM, EDS, and AES. Optimized AES parameters (10.0 kV, 10.0 nA) were validated using Cu and Cu₂O references. Oxidation resulted in color changes, increased surface texture, and chemical modification, with AES confirming the conversion of Cu to Cu₂O. Principal Component Analysis (PCA) and k-means clustering using IDAS effectively classified oxidation states, with PC1, PC2, and PC3 accounting for 42.22%, 25.06%, and 6.94% of the variation, respectively. This demonstrates IDAS as a reliable tool for monitoring copper degradation in semiconductor packaging.
- Download:
- IMEKO-TC8-11-24-2025-015.pdf
- DOI:
- 10.21014/tc24-2025.015
- Event details
- IMEKO TC:
- TC24
- Event name:
- IMEKO TC8, TC11 and TC24 Conference
- Title:
Joint conference of the TCs ‘Traceability in Metrology’ (IMEKO TC8), ‘Measurement in Testing, Inspection and Certification’ (IMEKO TC11), and ‘Chemical Measurements’ (IMEKO TC24).
- Place:
- Torino, ITALY
- Time:
- 14 September 2025 - 17 September 2025