ACCURATE DETERMINATION OF SPRING CONSTANT OF ATOMIC FORCE MICROSCOPE CANTILEVER AND COMPARISON WITH OTHER METHODS |
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| Min-Seok Kim, Jae-Hyuk Choi, Yon-Kyu Park |
- Abstract:
- We present an AFM cantilever calibration system: Nano Force Calibrator (NFC), which can provide accurate spring constant calibrations with traceability to SI. Two types of commercial beam-shaped AFM cantilevers (contact and tapping mode) are investigated using the NFC. Uncertainty analysis reveals that the uncertainty of present method is less than 1%. In addition, comparison between other famous calibration methods (dimensional, cantileveron- cantilever, and Sader method) and the NFC method is performed to assess the uncertainties of other three methods. From the comparison results, we estimate that the uncertainties of dimensional, cantilever-on-cantilever, and Sader method are around 10-15%, 10%, and 15-40%, respectively.
- Keywords:
- atomic force microscopy, calibration, cantilever, spring constant
- Download:
- PWC-2006-TC3-019u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006