CALIBRATION OF MICROFABRICATED CANTILEVERS FOR SI-TRACEABLE SMALL FORCE MEASUREMENT |
|---|
| Gordon A. Shaw, Jon R. Pratt, John A. Kramar |
- Abstract:
- A procedure is described by which the spring constant of a microfabricated cantilever beam can be calibrated for the measurement of small forces in an atomic force microscope (AFM) or other device. The procedure utilizes dynamic force instrumented indentation to determine the mechanical properties of the beam by applying a well-characterized oscillating force and measuring resulting displacement of the system. An uncertainty analysis is carried out, and by intercomparison with the U.S. National Institute of Standards and Technology (NIST) Electrostatic Force Balance (EFB). The spring constants determined using the indentation method agree within 2% of the values determined using the EFB for spring constants as low as 2 N/m.
- Keywords:
- atomic force microscopy, force, nanotechnology
- Download:
- PWC-2006-TC3-016u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006