PRELIMINARY STUDY FOR LOW VACUUM AND PRESSURE MEASUREMENT USING ULTRASONIC ACOUSTIC TRANSDUCERS |
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| S. S. Hong, B. Y. Ahn, S. H. Cho, H. W. Song, I. M. Choi |
- Abstract:
- New pressure measurement technique using acoustic impedance ultrasonic transducers was studied. Aircoupled ultrasonic transducers of 500 kHz frequency were used in the pressure range 1.33 × 103 Pa – 2.03 × 105 Pa. In the pressure range almost linearly proportional results were obtained for all five He, N2, Dry air, Ar, and Kr gases. It is suggested that the ultrasonic transducers can be successfully used for pressure measurements as it has many advantages against other measurement methods.
- Keywords:
- vacuum, pressure, ultrasonic transducer, gas sensitivity
- Download:
- IMEKO-WC-2012-TC16-P5.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012