ULTRA-PRECISION SET-UP AND REVERSAL TECHNIQUE FOR THE ERROR MAPPING OF A 2D SENSOR |
|---|
| M. Valenzuela, J. A. Yagüe, J. A. Albajez, J. J. Aguilar |
- Abstract:
- In this paper a calibration technique for the error mapping of a 2D sensor - a cross-grid encoder – is presented. A reversal technique to assess the squareness errors is used. The calibration set up includes a metrology frame made of Zerodur®, a very low coefficient thermal expansion material in order to reduce thermal errors. Additionally, an analysis by means of finite element method is carried out for an adequate design of the set up. Finally, the uncertainty values for the 2D cross-grid encoder system are calculated.
- Keywords:
- calibration, reversal technique, 2D sensor, Zerodur, uncertainty
- Download:
- IMEKO-WC-2012-TC14-P10.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012