INVESTIGATIONS OF NEW SILICON LOAD CELLS WITH THIN-FILM STRAIN GAUGES
Sascha Mäuselein, Oliver Mack, Roman Schwartz, Gerd Jäger
Abstract:
This paper discusses the usability of load cells (LCs) made of single crystalline silicon (Si) mechanical springs with sputtered-on thin-film strain gauges (SGs) as sensors for force and weighing measurements. Experimental investigations of the characteristic line in a temperature range from -10 °C to 40 °C concerning reproducibility, hysteresis and linearity are presented. The results offer the usability of the Si LC in the range of precision measurement if temperature behaviour of sensitivity and linearity are compensated.
Keywords:
silicon, load cell, strain gauge
Download:
IMEKO-WC-2009-TC3-374.pdf
DOI:
-
Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
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